Precision patterning of PDMS membranes and applications
نویسندگان
چکیده
This paper presents a method for precision patterning of polydimethylsiloxane (PDMS) membranes based on parylene C lift-off. The process permits the construction of PDMS membranes either with a highly flat, uniform top surface or with a controlled curvature. Effects of varying processing parameters on the geometrical characteristics of the PDMS membranes are described. The paper also demonstrates the application of the PDMS precision patterning method to the construction of PDMS microlens arrays, which require curved top surfaces, and a 3-axis electrostatic positioning stage that uses PDMS membranes with flat surfaces as a bonding material as well as a precisely defined spacer. (Some figures in this article are in colour only in the electronic version)
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